silicon nitride
|
Items |
(α-Si3N4) |
(β-Si3N4) |
Nano-Si3N4 |
|
|
phase content (%) |
α>93% |
β>95% |
amorphous |
|
|
chemical component |
N(wt%) |
38.5 |
38.5 |
38.5 |
|
O(wt%) |
1.25 |
1.25 |
1.25 |
|
|
C(wt%) |
0.2 |
0.2 |
0.2 |
|
|
Fe(ppm) |
<100 |
<100 |
<100 |
|
|
Al(ppm) |
<50 |
<50 |
<50 |
|
|
Ca(ppm) |
<50 |
<50 |
<50 |
|
|
Purity (%) |
99.9% |
99.9% |
99% |
|
|
particle size (μm) |
0.6um |
1-3um |
25nm |
|
